Cartridge & Housing

  All Tech-Flow Series Filter Cartridges

All Tech-Flow(ATEF) series filter cartridges utilized 100% Polytetrafluoro-ethylene(PTFE) membrane
with wide chemical compatibility and endures high temperature.
It is ideally suitable for the most semiconductor manufacturing process and filtration of high purity chemical
such as EL grade chemical at high operating temperature.
ATEF has high surface area for high flow rate with low pressure drop to provide long service life.
Each ATEF filter element is stamped with pore size and lot number for indentification and traceability.
100% Integrity test to ensure the quality before releasing.
Absolute rated at > 99.99% efficiency with retention.
Manufactured in a class 1,000 clean room.

Materials of Construction

Filter Media & Support Material: Expanded Polytetrafluoro-ethylene (ePTFE) Membrane

Hardware: PFA (Perfluoroalkoxy Alkanes)

Gaskets/ O-rings: Telfon Encapsulated Viton


Outside Diameter: 2.76'' (70mm)

Lengths: 4", 10'', 20'', 30''

Retention Ratings

0.02, 0.03, 0.05, 0.1, 0.2, 0.45, 1, 5, 10 µm Absolute

Operating Conditions

Maximum Operating Pressure: 85.6 psid (5.9 bar)

Maximum Operating Temperature: 356℉ (180℃)

Recommended Change Out Differential Pressure: 35 psid (2.4 bar)


Flow rate is per 10" cartridge. For liquids other than water, multiply the pressure drop by the fluid viscosity in centipoises.